Specification

Vertical measuring resolution

 1 nm (RMS)

Measuring repeatability

 3%

Horizontal scanning range

Data points per scanning line

 5000 points

Sample diameter

 60 mm × 60 mm

Recommended sample thickness

 ≤ 10 mm

Recommended sample dimension

Probe tip radius

 ≤ 5 µm

Probe material 

 Diamond coated

One touch scan

 Yes

Step analysis

Roughness analysis 

 Ra, Rq, Wa, Wq 

Scanning filter

 Yes

Scanning flatten 

 Yes

Raw data export

 Yes (text, excel file)

Targeting microscopic camera

 Embedded

Basic vibration isolator

 Yes