|
|
|
|
| |
|
|
| |
|
wafer size |
2-inch and 4-inch |
|
wafer type |
PW, PR, AEI, ADI |
|
scan method |
area scan |
|
resolution |
1.4um, single pattern loss detectable |
|
throughput |
60 wph for 2-inch/40,000片per month
|
|
detectable micro defect type |
pattern loss, contamination (particle) |
|
detectable macro defect type |
burning, comet(箭影),scratch, fiber(毛屑), |
|
robot loader |
YES |
|
pre-aligner |
YES |
|
ID reader（雷射刻號） |
YES |
|
auto focus |
YES |
|
sensitivity adjust |
YES |
|
stage number |
8, 4-in 4-out with sorting (12 optional) |
|
review camera |
0.28um resolution |
|
foot print |
160cm x 130cm |
|
weight |
500kg |
|
power |
220VAC, 1200W |
|
|
|
 |
|
|
